Layers
The following table gives an overview of the available layers in the SiFab demo PDK and how they are named.
LAYER NAME |
DESCRIPTION |
IPKISS LAYER (TECH.PPLAYER.*) |
GDS NUMBER |
|---|---|---|---|
SI |
Full Silicon - Waveguides |
SI |
1/0 |
TEXT |
Full Silicon - Text |
TEXT |
1/1 |
SHALLOW |
Shallow Silicon Etch - Gratings and Rib Waveguides |
SHALLOW |
2/0 |
SHALLOW_TRENCH |
Shallow Silicon Etch - Trenches |
SHALLOW_TRENCH |
2/2 |
SIN |
Silicon Nitride - Waveguides |
SIN |
3/0 |
SIN_SHALLOW |
Thin Silicon Nitride - Edge Couplers |
SIN_SHALLOW |
4/0 |
SIN_SHALLOW_TRENCH |
Thin Silicon Nitride - Trenches |
SIN_SHALLOW_TRENCH |
4/2 |
N_DRW |
Low Dose n-type Implant |
N |
5/0 |
NPLUS_DRW |
High Dose n-type Implant |
NPLUS |
6/0 |
P_DRW |
Low Dose p-type Implant |
P |
7/0 |
PPLUS_DRW |
High Dose n-type Implant |
PPLUS |
8/0 |
CON_DRW |
Via between Doped Layer and M1 |
CON |
11/0 |
HT |
Metal Heater |
HT |
15/0 |
M1 |
Metal 1 |
M1 |
20/0 |
V12 |
Via between M1 and M2 |
V12 |
21/0 |
M2 |
Metal 2 |
M2 |
22/0 |
GE |
Germanium |
GE |
30/0 |
DOC |
Design Documentation |
DOC |
50/0 |
ERROR |
Error Indication |
ERROR |
50/1 |